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Controller¿Í Turbo pump¸¦ Æ÷ÇÔÇÑ
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Spectrometer·Î ±¸¼º µÇ¾î ÀÖÀ¸¸ç, ºÐ¸®µÇ¾î ÀÖ´Ù.
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»ç¾ç
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He. sensitivity : 2 x 10-10 atm.cc/sec
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Response time : 0.5 sec
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Calibration : full automatic
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Pumping Speed : 70 l/s Turbo ¹× 300 ~ 450 l/m Backing pump
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ÃøÁ¤ ´ÜÀ§ ¼±Åð¡´É(atm.cc/s, mbar.l/s, Torr.l/s, Pa.m3/s)
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Leak Rate Analog Output : 0 - 10V
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°¨ÁöºÎ¸¦ ÀüÀÚºÎ¿Í ÃÖ´ë 4.6m ¶³¾îÁ® ¼³Ä¡°¡´É
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ÁÖ¿ä ¿ëµµ
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Leak Test¿ë ½Ã½ºÅÛ Á¦ÀÛ
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ÀÚµ¿Â÷ ´©¼³ °Ë»ç
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³Ãµ¿±â ´©¼³ °Ë»ç |
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990 dCLDll ´©¼³ °¨Áö±â´Â Te st ÇϰíÀÚ ÇÏ´Â ¾î¶°ÇÑ Àåºñ¿¡µµ ½±°Ô ¼³Ä¡ÇÒ ¼ö ÀÖ´Â ¸ðµâÈµÈ ´©¼³ °¨Áö±â ¼¼Æ®ÀÌ´Ù. 990
dCLDll ´©¼³ °¨Áö±âÀÇ ÀüÀÚºÎ(Á¶Á¤, ´©¼³¾ç Ç¥½Ã, ÀÚ·á ¼Û.¼ö½Å¿ë)´Â ´©¼³ °¨ÁöºÎ(Sensing module) °ú Áø°ø ÆßÇÁ¿Í ºÐ¸®µÇ¾î
ÀÖÀ¸¸ç, °í°´ÀÇ ¿ä±¸¿¡µû¶ó À̵é·ÎºÎÅÍ ÃÖ´ë4.6m À̳»ÀÇ °Å¸®¸¦ µÎ°í ¼³Ä¡°¡ °¡´ÉÇÏ´Ù.
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